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Fabrication and characterization of three-dimensional microlens arrays in sol-gel glass

Author
ORHAN, Jean-Baptiste1 ; VIRENDRA KUMAR PARASHAR1 ; SAYAH, Abdeljalil1 ; GIJS, Martin A. M1
[1] Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
Source

Journal of microelectromechanical systems. 2006, Vol 15, Num 5, pp 1159-1164, 6 p ; ref : 33 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Microlens array micro-optics micromoulding photoresist poly-dimethylsiloxane (PDMS) replication sol-gel glass thermal softening
Keyword (fr)
Dispositif microélectromécanique Dôme Microlentille Microoptique Optique intégrée Photorésist Processus fabrication Procédé sol gel Propriété optique Retrait Rugosité Silicium oxyde Siloxane(diméthyl) polymère Trame microlentille Verre
Keyword (en)
Microelectromechanical device Dome Microlens Microoptics Integrated optics Photoresist Production process Sol gel process Optical properties Shrinkage Roughness Silicon oxides Dimethylsiloxane polymer Microlens arrays Glass
Keyword (es)
Dispositivo microelectromecánico Domo Microlente Microóptica Optica integrada Fotorresistencia Proceso fabricación Procedimiento sol gel Propiedad óptica Retiro Rugosidad Siloxano(dimetil) polímero Red microlente Vidrio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18197920

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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