Compositional depth profiling of polycrystalline thin films by grazing-incidence X-ray diffraction
- Author
- KÖTSCHAU, I. M1 ; SCHOCK, H. W1
[1] Hahn-Meitner-Institut, Glienicker Str. 100, 14109 Berlin, Germany - Source
Journal of applied crystallography. 2006, Vol 39, pp 683-696, 14 p ; 5 ; ref : 28 ref
- CODEN
- JACGAR
- ISSN
- 0021-8898
- Scientific domain
- Crystallography
- Publisher
- Blackwell, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Angle incidence Chalcopyrite Couche mince Cuivre Diagramme diffraction Diffraction RX Dépôt physique phase vapeur Etude théorique Fonction appareil Incidence rasante Métal transition Paramètre cristallin Profil profondeur Rugosité Solution solide Spectrométrie masse 6110N 8115C Analyse RX dispersion énergie Ga Se
- Keyword (en)
- Incidence angle Chalcopyrite Thin films Copper Diffraction pattern XRD Physical vapor deposition Theoretical study Instrument function Grazing incidence Transition elements Lattice parameters Depth profiles Roughness Solid solutions Mass spectroscopy Energy-dispersive X-ray analysis
- Keyword (es)
- Diagrama difracción Función aparato Incidencia rasante
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A10 X-ray diffraction and scattering / 001B60A10N Single-crystal and powder diffraction
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18224512
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1107/S002188980601987X 
https://dx.doi.org/10.1107/S002188980601987X
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