Correlation of scatterometry sensitivities to variation in device parameters
- Author
- KO, Chun-Hung1 ; KU, Yi-Sha1 ; SMITH, Nigel2
[1] Industrial Technology Research Institute, 321 Kuang Fu Rd 2, Hsinchu, 300, Taiwan, Province of China
[2] Accent Optical Technologies, 18 Creation Rd 1, Hsinchu, Taiwan, Province of China - Conference title
- Metrology, inspection, and process control for microlithography XX (20-23 February 2006, San Jose, California, USA)
- Conference name
- Metrology, inspection, and process control for microlithography. Conference (20 ; 2006)
- Author (monograph)
- Archie, Chas N (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 2Vol ; vol 1, 615220.1-615220.9 ; ref : 6 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 0-8194-6195-4
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham (Wash.)
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Erreur mesure Erreur quadratique moyenne Méthode mesure Réseau neuronal Valeur efficace
- Keyword (en)
- Measurement error Mean square error Measurement method Neural network Root mean square value
- Keyword (es)
- Error medida Error medio cuadrático Método medida Red neuronal Valor eficaz
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G03 Neural networks
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18243997
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1117/12.656147 
https://dx.doi.org/10.1117/12.656147
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