A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process
- Author
- CHANG, Stella1 ; SIVOTHTHAMAN, Siva1
[1] Department of Electrical and Computer Engineer ing, University of Waterloo, Waterloo, ON N2L 3G1, Canada - Source
IEEE electron device letters. 2006, Vol 27, Num 11, pp 905-908, 4 p ; ref : 17 ref
- CODEN
- EDLEDZ
- ISSN
- 0741-3106
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Inductors Q factor microelectromechanical devices microwave devices silicon (Si) tunable circuits and devices
- Keyword (fr)
- Accord fréquence Bobine inductance Circuit accordable Dispositif hyperfréquence Dispositif microélectromécanique Facteur qualité Fréquence résonance Inductance Matériau amorphe Radiofréquence
- Keyword (en)
- Tuning Inductor Tunable circuit Microwave device Microelectromechanical device Q factor Resonance frequency Inductance Amorphous material Radiofrequency
- Keyword (es)
- Sintonización frecuencia Inductor Circuito acordable Dispositivo hiperfrecuencia Dispositivo microelectromecánico Factor calidad Frecuencia resonancia Inductancia Material amorfo Radiofrecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F08 Microwave and submillimeter wave devices, electron transfer devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F10 Magnetic devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18256267
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/LED.2006.884712 
https://dx.doi.org/10.1109/LED.2006.884712
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