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Rapid determination of stress factors and absolute residual stresses in thin films

Author
MARTINSCHITZ, K. J1 ; EIPER, E1 ; MASSL, S1 ; KÖSTENBAUER, H2 ; DANIEL, R3 ; FONTALVO, G2 ; MITTERER, C2 3 ; KECKES, J1
[1] Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Department of Materials Physics, University of Leoben and Materials Center Leohen, Austria
[2] Department of Physical Metallurgy and Materials Testing, Universiy of Leoben, Leoben, Austria
[3] Christian-Doppler Laboratory for Advanced Coatings, University of Leoben, Leoben, Austria
Source

Journal of applied crystallography. 2006, Vol 39, pp 777-783, 7 p ; 6 ; ref : 19 ref

CODEN
JACGAR
ISSN
0021-8898
Scientific domain
Crystallography
Publisher
Blackwell, Oxford
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Analyse diagramme diffraction Angle inclinaison Chrome nitrure Contrainte résiduelle Couche mince Diagramme rotation Diffraction RX Fonction minimale Goniomètre Mesure contrainte Mesure courbure Nanocristal Titane nitrure 0710P 0785J 6110N Cr N CrN Substrat Si Substrat acier TiN
Keyword (en)
Diffraction pattern analysis Inclination Chromium nitrides Residual stresses Thin films Rocking curve XRD Residual factor Goniometers Stress measurement Curvature measurement Nanocrystal Titanium nitrides
Keyword (es)
Análisis diagrama difracción Diagrama rotación Función mínima Nanocristal
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10P Instruments for strain, force and torque

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G85 X- and γ-ray instruments and techniques / 001B00G85J Diffractometers

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A10 X-ray diffraction and scattering / 001B60A10N Single-crystal and powder diffraction

Discipline
Metrology Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18318953

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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