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RF-MEMS capacitive switches fabricated using printed circuit processing techniques

Author
RAMADOSS, Ramesh1 ; LEE, Simone2 ; LEE, Y. C3 ; BRIGHT, V. M3 ; GUPTA, K. C3
[1] Department of Electrical Engineering, Auburn University, Auburn, AL 36849, United States
[2] Form Factor Inc, Livermore, CA 94551, United States
[3] University of Colorado, Boulder, CO 80309, United States
Source

Journal of microelectromechanical systems. 2006, Vol 15, Num 6, pp 1595-1604, 10 p ; ref : 28 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Coplanar waveguide (CPW) Shunt switch Kapton E Polyimide film printed circuit board microelectromechanical systems (PCB-MEMS) printed circuit printed wiring board microelectromechanical systems (PWB-MEMS) radio frequency microelectromechanical systems (RF-MEMS) switches
Keyword (fr)
Capacité électrique Circuit imprimé Commutateur Dispositif microélectromécanique Dispositif électrostatique Domaine fréquence GHz Imide polymère Ligne coplanaire Membrane Mésoéchelle Perte insertion Radiofréquence Transducteur capacitif
Keyword (en)
Capacitance Printed circuits Switches Microelectromechanical device Electrostatic devices GHz range Polyimides Coplanar line Membranes Mesoscale Insertion loss Radiofrequency Capacitive transducer
Keyword (es)
Dispositivo microelectromecánico Línea coplanaria Mesoescala Pérdida inserción Radiofrecuencia Transductor capacitivo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits

Discipline
Electronics Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18364262

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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