RF-MEMS tunable capacitor with 3 V operation using folded beam piezoelectric bimorph actuator
- Author
- KAWAKUBO, Takashi1 ; NAGANO, Toshihiko2 ; NISHIGAKI, Michihiko2 ; ABE, Kazuhide2 ; ITAYA, Kazuhiko2
[1] Toshiba Research Consulting Corporation, Kawasaki, Japan
[2] Advanced Electron Devices Laboratory, Corporate R&D Center, Toshiba Corporation, Kawasaki, Japan - Source
Journal of microelectromechanical systems. 2006, Vol 15, Num 6, pp 1759-1765, 7 p ; ref : 20 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Actuators capacitors piezoelectric devices radio communication
- Keyword (fr)
- Accord fréquence Actionneur piézoélectrique Circuit hyperfréquence Condensateur Contrainte résiduelle Dispositif microélectromécanique Dispositif piézoélectrique Facteur qualité Métal Oxyde Radiofréquence Semiconducteur Transducteur capacitif Transducteur piézoélectrique Télécommunication sans fil Microusinage surface Réseau sans fil
- Keyword (en)
- Tuning Piezoelectric actuators Microwave circuit Capacitor Residual stress Microelectromechanical device Piezoelectric device Q factor Metal Oxides Radiofrequency Semiconductor materials Capacitive transducer Piezoelectric sensor Wireless telecommunication Surface micromachining Wireless network
- Keyword (es)
- Sintonización frecuencia Circuito hiperfrecuencia Condensador Tensión residual Dispositivo microelectromecánico Dispositivo piezoeléctrico Factor calidad Metal Óxido Radiofrecuencia Semiconductor(material) Transductor capacitivo Transductor piezoelectrico Telecomunicación sin hilo Micromaquinado superficie Red sin hilo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18364279
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2006.885985 
https://dx.doi.org/10.1109/JMEMS.2006.885985
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