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Recent developments in nanofabrication using scanning near-field optical microscope lithography

Author
TSENG, Ampere A1
[1] Department of Mechanical and Aerospace Engineering, Arizona State University, Tempe, Arizona 85287-6106, United States
Source

Optics and laser technology. 2007, Vol 39, Num 3, pp 514-526, 13 p ; ref : 48 ref

CODEN
OLTCAS
ISSN
0030-3992
Scientific domain
Electronics; Optics; Telecommunications
Publisher
Elsevier Science, Oxford
Publication country
United Kingdom
Document type
Article
Language
English
Author keyword
Nanofabrication Nanolilhography Scanning near-field optical microscopy
Keyword (fr)
Etude expérimentale Fiabilité Lithographie Microscopie optique champ proche Procédé fabrication 0779F Nanofabrication
Keyword (en)
Experimental study Reliability Lithography Near-field scanning optical microscopy Manufacturing processes Nanofabrication
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques / 001B00G79F Near-field scanning optical microscopes

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18402404

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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