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Fabrication of ohmic Au/Cr contacts on top of cubic Boron Nitride films

Author
YIN, H1 ; BOYEN, H.-G1 ; ZHANG, X.-W1 ; ZIEMANN, P1
[1] Abteilung Festkörperphysik, Universität Ulm, 89069, Ulm, Germany
Source

Diamond and related materials. 2007, Vol 16, Num 1, pp 46-49, 4 p ; ref : 19 ref

ISSN
0925-9635
Scientific domain
Crystallography
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
Cubic boron nitride Electrical contact Ohmic property
Keyword (fr)
Adhérence Bore nitrure Caractéristique courant tension Chrome Contact ohmique Contact électrique Couche mince métallique Couche mince Métal transition Méthode ablation laser Propriété mécanique Propriété électrique Réseau cubique Température ambiante 6860B 8115F BN CaSeS
Keyword (en)
Adhesion Boron nitrides IV characteristic Chromium Ohmic contacts Electric contacts Metallic thin films Thin films Transition elements Laser ablation technique Mechanical properties Electrical properties Cubic lattices Ambient temperature
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition

Discipline
Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18405542

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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