Fabrication of ohmic Au/Cr contacts on top of cubic Boron Nitride films
- Author
- YIN, H1 ; BOYEN, H.-G1 ; ZHANG, X.-W1 ; ZIEMANN, P1
[1] Abteilung Festkörperphysik, Universität Ulm, 89069, Ulm, Germany - Source
Diamond and related materials. 2007, Vol 16, Num 1, pp 46-49, 4 p ; ref : 19 ref
- ISSN
- 0925-9635
- Scientific domain
- Crystallography
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Cubic boron nitride Electrical contact Ohmic property
- Keyword (fr)
- Adhérence Bore nitrure Caractéristique courant tension Chrome Contact ohmique Contact électrique Couche mince métallique Couche mince Métal transition Méthode ablation laser Propriété mécanique Propriété électrique Réseau cubique Température ambiante 6860B 8115F BN CaSeS
- Keyword (en)
- Adhesion Boron nitrides IV characteristic Chromium Ohmic contacts Electric contacts Metallic thin films Thin films Transition elements Laser ablation technique Mechanical properties Electrical properties Cubic lattices Ambient temperature
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18405542
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.diamond.2006.03.018 
https://dx.doi.org/10.1016/j.diamond.2006.03.018
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