A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method
- Author
- KONDO, S1 ; NANBU, K1
[1] Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan - Source
Journal of physics. D, Applied physics (Print). 1999, Vol 32, Num 10, pp 1142-1152 ; ref : 31 ref
- CODEN
- JPAPBE
- ISSN
- 0022-3727
- Scientific domain
- Condensed state physics; Physics; Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Analyse numérique Autocohérence Configuration plane Courant continu Décharge Magnétron Méthode Monte Carlo Méthode particule dans cellule
- Keyword (en)
- Numerical analysis Self consistency Plane configuration Direct current Discharge Magnetron Monte Carlo method Particle in cell method
- Keyword (es)
- Análisis numérico Autocoherencia Configuración plana Corriente contínua Descarga Magnetrón Método Monte Carlo Método partícula dentro célula
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation / 001B50B65P Monte carlo methods
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation / 001B50B65R Particle-in-cell method
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03E Electronic tubes, masers
- Discipline
- Electronics Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1842040
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0022-3727/32/10/311 
https://dx.doi.org/10.1088/0022-3727/32/10/311
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