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Radio frequency plasma nitriding of aluminium at higher power levels

Author
GREDELJ, Sabina1 2 ; KUMAR, Sunil1 ; GERSON, Andrea R1 3 ; CAVALLARO, Giuseppe P2
[1] Ian Wark Research Institute, ARC Special Research Centre for Particle and Material Interfaces, University of South Australia, Mawson Lakes, South Australia 5095, Australia
[2] CSIRO Manufacturing and Infrastructure Technology, P.O. Box 4, Woodville, South Australia 5011, Australia
[3] Applied Centre for Structural and Synchrotron Studies, University of South Australia, Mawson Lakes, South Australia 5095, Australia
Source

Thin solid films. 2006, Vol 515, Num 4, pp 1480-1485, 6 p ; ref : 15 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Author keyword
Aluminium alloys Aluminium nitride Plasma nitriding SEM XPS
Keyword (fr)
Aluminium alliage Aluminium nitrure Aluminium oxyde Composé III-V Microscopie électronique balayage Nitruration Semiconducteur III-V Spectre photoélectron RX Traitement thermochimique 8105E Al2O3 AlN
Keyword (en)
Aluminium alloys Aluminium nitrides Aluminium oxides III-V compound Scanning electron microscopy Nitridation III-V semiconductors X-ray photoelectron spectra Thermochemical treatment
Keyword (es)
Compuesto III-V Tratamiento termoquímico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05H Other semiconductors

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18439939

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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