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Properties of LiNbO3 thin film prepared from ceramic Li-Nb-K-O target

Author
PARK, S.-K1 ; BAEK, M.-S1 ; BAE, S.-C1 ; KWUN, S.-Y2 ; KIM, K.-T3 ; KIM, K.-W1
[1] Department of Electronic Engineering, Kyungpook National University, San-Kyeuk-dong 1370, Taegu, Korea, Republic of
[2] Department of Sensor Engineering, Kyungpook National University, San-Kyeuk-dong 1370, Taegu, Korea, Republic of
[3] Department of Inorganic Materials Engineering, Kyungpook National University, San-Kyeuk-dong 1370, Taegu, Korea, Republic of
Source

Solid state communications. 1999, Vol 111, Num 6, pp 347-352 ; ref : 20 ref

CODEN
SSCOA4
ISSN
0038-1098
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier, Oxford
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Composé ternaire Constante diélectrique Couche mince Dépendance fréquence Dépendance température Etude expérimentale Lithium Niobate Microstructure Mode opératoire Pulvérisation irradiation Relation fabrication propriété SEM Composé minéral Métal transition composé
Keyword (en)
Ternary compounds Permittivity Thin films Frequency dependence Temperature dependence Experimental study Lithium Niobates Microstructure Operating mode Sputtering Fabrication property relation SEM Inorganic compounds Transition element compounds
Keyword (es)
Método operatorio Relación fabricación propiedad
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70G Dielectrics, piezoelectrics, and ferroelectrics and their properties / 001B70G55 Dielectric thin films

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Pacs
7755 Dielectric thin films

Pacs
8115C Deposition by sputtering

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1849829

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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