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Rapid prototyping of microfluidic chips in COC

Author
STEIGERT, J1 ; HAEBERLE, S1 ; DUCREE, J1 4 ; BRENNER, T1 ; MÜLLER, C2 ; STEINERT, C. P1 ; KOLTAY, P1 ; GOTTSCHLICH, N3 ; REINECKE, H2 4 ; RÜHE, J5 ; ZENGERLE, R1 4
[1] Laboratory for MEMS Applications, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany
[2] Laboratory for Process Technology, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany
[3] Greiner-Bio-One GmbH, Maybachstrasse 2, 72636 Frickenhausen, Germany
[4] HSG-IMIT, Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany
[5] Laboratory for Chemistry and Physics of Interfaces, Department of Microsystems Engineering (IMTEK), University of Freiburg, Germany
Source

Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 2, pp 333-341, 9 p ; ref : 55 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Composé hydrophobe Epoxyde résine Fluidique Formage à chaud Gaufrage Gravure faisceau ionique Gravure ionique réactive Microfluidique Moulage injection Méthacrylate de méthyle polymère Outillage Photorésist Prototypage rapide Salle blanche Siloxane(diméthyl) polymère Traitement surface Microusinage surface
Keyword (en)
Hydrophobic compound Epoxy resin Fluidics Hot forming Embossing Ion beam etching Reactive ion etching Microfluidics Injection molding PMMA Tooling Photoresists Rapid prototyping Clean rooms Dimethylsiloxane polymer Surface treatments Surface micromachining
Keyword (es)
Compuesto hidrofobo Epóxido resina Termoconformado Gofrado Grabado haz iónico Grabado iónico reactivo Moldeo por inyección Herramienta Prototipificación rápida Siloxano(dimetil) polímero Micromaquinado superficie
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A04 Machinery and processing / 001D10A04A Plastics / 001D10A04A2 Moulding

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics Polymer industry, paints, wood
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18525958

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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