A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer
- Author
- LEE, Dong-Yeon1 ; KIM, Dong-Min1 ; GWEON, Dae-Gab1 ; PARK, Jinwon2
[1] Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1, Guseong-dong, Yuseong-ku, Daejeon 307-701, Korea, Republic of
[2] Division of Optical Metrology, Korea Research Institute of Standards and Science (KRISS), Daejeon 305-340, Korea, Republic of - Source
Applied surface science. 2007, Vol 253, Num 8, pp 3945-3951, 7 p ; ref : 11 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 81.70.Fy 83.85.Ei Calibrated atomic force microscope Flexure-guide Laser interferometer Orthogonal scanner
- Keyword (fr)
- Microscopie force atomique
- Keyword (en)
- Atomic force microscopy
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18529050
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2006.08.027 
https://dx.doi.org/10.1016/j.apsusc.2006.08.027
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