Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field
- Author
- BEYELER, Felix1 ; NEILD, Adrian2 ; OBERTI, Stefano2 ; BELL, Dominik J1 ; YU SUN3 ; DUAL, Jurg2 ; NELSON, Bradley J1
[1] Institute of Robotics and Intelligent Systems, Swiss Federal Institute of Technology, 8092 Zürich, Switzerland
[2] Center of Mechanics, Swiss Federal Institute of Technology, 8092 Zürich, Switzerland
[3] Department of Mechanical and Industrial Engineering. University of Toronto, Toronto, ON, Canada - Source
Journal of microelectromechanical systems. 2007, Vol 16, Num 1, pp 7-15, 9 p ; ref : 15 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Capacitive force sensor HeLa cancer cells electrostatic microgripper force feedback handling biological cells microelectromechanical systems (MEMS) micromanipulation silicon-on-insulator (SOI) fabrication ultrasonic positioning
- Keyword (fr)
- Alignement Biologie cellulaire Capteur force Circuit intégré monolithique Dispositif microélectromécanique Effet non linéaire Machine électrostatique Mesure force Micromanipulation Positionnement Préhenseur Rétroaction Technologie silicium sur isolant Transducteur capacitif Transducteur enfoui Ultrason
- Keyword (en)
- Alignment Cell biology Force transducer Monolithic integrated circuit Microelectromechanical device Non linear effect Electrostatic machine Force measurement Micromanipulation Positioning Gripper Feedback regulation Silicon on insulator technology Capacitive transducer Embedded transducer Ultrasound
- Keyword (es)
- Alineamiento Biología celular Transductor fuerza Circuito integrado monolítico Dispositivo microelectromecánico Efecto no lineal Máquina electrostática Medición esfuerzo Micromanipulación Posicionamiento Prensor(robot) Retroacción Tecnología silicio sobre aislante Transductor capacitivo Transductor embebido Ultrasonido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Pascal
- 002 Biological and medical sciences / 002A Fundamental and applied biological sciences. Psychology / 002A04 Molecular and cellular biology / 002A04B Diverse techniques
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology Molecular and cell biology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18539808
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2006.885853 
https://dx.doi.org/10.1109/JMEMS.2006.885853
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