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Experimental measurements of the strain energy release rate for stiction-failed microcantilevers using a single-cantilever beam peel test

Author
LESEMAN, Zayd C1 ; CARLSON, Steven P1 ; MACKIN, Thomas J2
[1] Department of Mechanical and Industrial Engineering, University of Illinois Urbana-Champaign, Urbana, IL 61801, United States
[2] Department of Mechanical Engineering, California Polytechnic State University, San Luis Obispo, CA 93407, United States
Source

Journal of microelectromechanical systems. 2007, Vol 16, Num 1, pp 38-43, 6 p ; ref : 19 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Cantilever peel test stiction strain energy
Keyword (fr)
Actionneur piézoélectrique Adhérence Adhésif Assemblage collé Commande déplacement Commande mouvement Dispositif microélectromécanique Effet dimensionnel Eprouvette essai Essai pelage Etude expérimentale Fissure Frottement statique Mesure contrainte Mesure déformation Modélisation Poutre cantilever Rupture Silicium polycristallin Transducteur piézoélectrique
Keyword (en)
Piezoelectric actuators Adhesion Adhesives Adhesive joint Displacement control Motion control Microelectromechanical device Size effect Test bar Peel test Experimental study Cracks Stiction Stress measurement Strain measurement Modelling Cantilever beam Ruptures Polysilicon Piezoelectric transducers
Keyword (es)
Ensambladura pegada Dispositivo microelectromecánico Probeta ensayo Prueba al descascarado Viga cantilever Silicio policristal
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18539812

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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