Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator
- Author
- KAWASHIMA, Kenji1 ; KATO, Tomonori2 ; SAWAMOTO, Koichi1 ; KAGAWA, Toshiharu2
[1] Tokyo Institute of Technology, 4259 R2-46 Nagatsuta, Midori-ku, Yokohama, Kanagawa, Japan
[2] Tokyo Metropolitan College of Industrial Technology, 1-10-40 Higashi-oi, Shinagawa, Tokyo, Japan - Source
Precision engineering. 2007, Vol 31, Num 2, pp 139-145, 7 p ; ref : 8 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier Science, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Active control Air-spring Isolation table Pressure differentiator
- Keyword (fr)
- Amortisseur pneumatique Mécanique précision Méthode directe Processus fabrication Rétroaction Semiconducteur Système actif
- Keyword (en)
- Pneumatic damper Precision engineering Direct method Production process Feedback regulation Semiconductor materials Active system
- Keyword (es)
- Amortiguador neumático Mecánica precisión Método directo Proceso fabricación Retroacción Semiconductor(material) Sistema activo
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18586032
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.precisioneng.2006.05.002 
https://dx.doi.org/10.1016/j.precisioneng.2006.05.002
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