Fabrication of an integrated piezo-electric micro-nebulizer for biochemical sample analysis
- Author
- PAN, C. T1 ; SHIEA, J2 ; SHEN, S. C3
[1] Department of Mechanical and Electro-Mechanical Engineering, Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Taiwan, Province of China
[2] Department of Chemistry, National Sun Yat-Sen University, Taiwan, Province of China
[3] Mechanical Industry Research Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan, Province of China - Source
Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 3, pp 659-669, 11 p ; ref : 19 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur piézoélectrique Analyse biochimique Cobalt alliage Consommation énergie Distribution concentration Distribution dimension particule Dureté Dépôt électrolytique Essai dureté Etude expérimentale Gouttelette Microanalyse Microcavité Microfluidique Moulage injection Moule Nickel alliage Nébuliseur Piézoélectricité Processus fabrication Rapport aspect Spectrométrie masse Ultrason
- Keyword (en)
- Piezoelectric actuators Biochemical analysis Cobalt alloys Energy consumption Concentration distribution Particle size distribution Hardness Electrodeposition Hardness testing Experimental study Droplets Microanalysis Microcavities Microfluidics Injection molding Mold Nickel alloys Nebulizer Piezoelectricity Production process Aspect ratio Mass spectroscopy Ultrasonic waves
- Keyword (es)
- Análisis bioquímico Distribución concentración Distribución dimensión partícula Moldeo por inyección Molde Nebulizador Proceso fabricación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18593399
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/17/3/031 
https://dx.doi.org/10.1088/0960-1317/17/3/031
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