Reduction of sheet resistance and low-thermal-budget relaxation of stress gradients in polysilicon microcantilever beams using nickel-silicides
- Author
- TAE JUNE KANG1 ; LEE, Ho-Young1 ; YONG HYUP KIM1 2
[1] School of Mechanical and Aerospace Engineering, Seoul National University, Seoul 151-3742, Korea, Republic of
[2] Institute of Advanced Aerospace Technology, Seoul National University, Seoul 151-742, Korea, Republic of - Source
Journal of microelectromechanical systems. 2007, Vol 16, Num 2, pp 279-288, 10 p ; ref : 33 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Cathodic protection nickel-silicide sheet resistance stress gradient
- Keyword (fr)
- Contrainte résiduelle Contrôle contrainte mécanique Contrôle déformation mécanique Dispositif microélectromécanique Essai en place Etude expérimentale Gradient déformation Nickel Poutre cantilever Relaxation contrainte Résistance thermique Résistivité couche Silicium polycristallin
- Keyword (en)
- Residual stresses Stress control Strain control Microelectromechanical device In situ test Experimental study Strain gradient Nickel Cantilever beam Stress relaxation Thermal resistance Sheet resistivity Polysilicon
- Keyword (es)
- Dispositivo microelectromecánico Ensayo en sitio Gradiente deformación Viga cantilever Silicio policristal
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18687309
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2007.892898 
https://dx.doi.org/10.1109/JMEMS.2007.892898
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