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Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

Author
BHUSHAN, Abhinav1 2 ; YEMANE, Dawit1 ; OVERTON, Edward B3 ; GOETTERT, Jost1 ; MURPHY, Michael C2
[1] Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, LA 70803, United States
[2] Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, United States
[3] Department of Environmental Studies, Louisiana State University, Baton Rouge, LA 70803, United States
Source

Journal of microelectromechanical systems. 2007, Vol 16, Num 2, pp 383-393, 11 p ; ref : 58 ref

ISSN
1057-7157
Scientific domain
Electronics; Mechanics acoustics; Physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
Fast gas chromatography LiGA X-ray lithography micro gas chromatograph (GC)
Keyword (fr)
Appareil portatif Capteur mesure Chromatographie phase gazeuse Condition stationnaire Dispositif microélectromécanique Débit Dépôt électrolytique Détecteur de gaz Etude expérimentale Fluidique Hydrocarbure Microfluidique Microstructure élancée Modélisation Métal Nickel Technologie LIGA
Keyword (en)
Portable equipment Measurement sensor Gas chromatography Stationary condition Microelectromechanical device Flow rate Electrodeposition Gas detector Experimental study Fluidics Hydrocarbon Microfluidics High aspect ratio microstructure HARM Modeling Metal Nickel LIGA
Keyword (es)
Aparato portátil Captador medida Cromatografía fase gaseosa Condición estacionaria Dispositivo microelectromecánico Gasto Depósito electrolítico Detector de gas Estudio experimental Fluídico Hidrocarburo Microestructura esbelta Modelización Metal Niquel
Keyword (de)
Transportables Geraet Messwertaufnehmer Gaschromatographie Stroemungsgeschwindigkeit Elektroplattieren Experimentelle Untersuchung Kohlenwasserstoff Metalle Nickel
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G10 General theory

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C01 Foundry engineering / 001D11C01F Other casting methods. Solidification

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Mechanical engineering. Mechanical construction. Handling Metals. Metallurgy Physics : fluid mechanics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18687322

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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