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Recent results on the use of model resolution functions for the deconvolution of depth profiling data

Author
KOTZ, Samuel1 ; NADARAJAH, Saralees2
[1] Department of Engineering Management and Systems Engineering, George Washington University, Washington, DC 20052, United States
[2] School of Mathematics, University of Manchester, Manchester M60 1QD, United Kingdom
Source

Surface and interface analysis. 2007, Vol 39, Num 6, pp 554-555, 2 p ; ref : 11 ref

CODEN
SIANDQ
ISSN
0142-2421
Scientific domain
General chemistry, physical chemistry; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
Publisher
Wiley, Chichester
Publication country
United Kingdom
Document type
Article
Language
English
Author keyword
deconvolution double exponential resolution function initial Gaussian profile
Keyword (fr)
Analyse surface Déconvolution Profil profondeur
Keyword (en)
Surface analysis Deconvolution Depth profiles
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A70 Materials testing

Pacs
8170J Chemical composition analysis, chemical depth and dopant profiling

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18720141

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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