Pascal and Francis Bibliographic Databases

Help

Permanent link : http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18742203

Export

Selection :

Fabrication and characterization of fine pitch on-chip copper interconnects for advanced wafer level packaging by a high aspect ratio through AZ9260 resist electroplating

Author
DIXIT, Pradeep1 ; CHEE WEE TAN1 ; LUHUA XU1 ; LIN, Nay1 ; JIANMIN MIAO1 ; PANG, John H. L1 ; BACKUS, Petra2 ; PREISSER, Robert2
[1] Micromachines Center, School of Mechanical & Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
[2] Atotech, Deutschland GmbH, Berlin, 10553, Germany
Source

Journal of micromechanics and microengineering (Print). 2007, Vol 17, Num 5, pp 1078-1086, 9 p ; ref : 21 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Alliage base cuivre Cuivre Dépôt électrolytique Encapsulation Lithographie Microscopie force Microstructure élancée Moule Métal Photorésist Processus fabrication Rapport aspect Revêtement centrifugation Sonde Kelvin Système sur puce
Keyword (en)
Copper base alloys Copper Electrodeposition Encapsulation Lithography Force microscopy High aspect ratio microstructure HARM Mold Metal Photoresist Production process Aspect ratio Spin-on coatings Kelvin probe System on a chip
Keyword (es)
Cobre Depósito electrolítico Encapsulación Litografía Microscopía fuerza Microestructura esbelta Molde Metal Fotorresistencia Proceso fabricación Relación dimensional Sonda Kelvin Sistema sobre pastilla
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18742203

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

Access to the document

Searching the Web