Effects of residual stress on the electrical properties of PZT films
- Autor
- LEE, Jae-Wung1 ; PARK, Chee-Sung1 ; KIM, Miyoung1 ; KIM, Hyoun-Ee1
[1] Department of Materials Science and Engineering, Seoul National University, Seoul, 151-742, Korea, Republic of - Fuente
Journal of the American Ceramic Society. 2007, Vol 90, Num 4, pp 1077-1080, 4 p ; ref : 20 ref
- CODEN
- JACTAW
- ISSN
- 0002-7820
- Campo Científico
- Chemical industry parachemical industry
- Editor
- Blackwell, Malden,MA
- País de la publicación
- United States
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave (fr)
- Composé minéral Contrainte résiduelle Couche mince Etude expérimentale Magnétron PZT Plomb Titanate Zirconate Propriété ferroélectrique Propriété piézoélectrique Propriété électrique Pulvérisation haute fréquence Relation fabrication propriété Titanate Traitement thermique Zirconate Pb(Zr0,52Ti0,48)O3
- Palabra clave (in)
- Inorganic compounds Residual stresses Thin films Experimental study Magnetrons PZT Lead Titanates Zirconates Ferroelectric properties Piezoelectric properties Electrical properties Radiofrequency sputtering Fabrication property relation Titanates Heat treatments Zirconates
- Palabra clave (es)
- Propiedad ferroeléctrica Propiedad piezoeléctrica Pulverización alta frecuencia Relación fabricación propiedad
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61L Other inorganic semiconductors
- Disciplina
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 18742462
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1111/j.1551-2916.2007.01610.x 
https://dx.doi.org/10.1111/j.1551-2916.2007.01610.x
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