Comparing internal stress in diamond-like carbon films with different structure
- Author
- PENG WANG1 2 ; XIA WANG1 2 ; XU, Tao1 ; WEIMIN LIU1 ; JUNYAN ZHANG1
[1] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, 730000, Puerto Rico
[2] Graduate School Chinese Academy of Sciences, Beijing, 100039, Puerto Rico - Source
Thin solid films. 2007, Vol 515, Num 17, pp 6899-6903, 5 p ; ref : 24 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- DLC films; Internal stress; Ti-interlayer; Ti-doping; Functional gradient
- Keyword (fr)
- Acier inoxydable Carbone adamantin Coefficient dilatation thermique Contrainte interne Contrainte thermique Couche intermédiaire Couche mince Croissance film Dopage Effet contrainte Microstructure Propriété mécanique Structure électronique Tension polarisation Titane 6855J 6860B 7320A 8105U Substrat Si Substrat acier inoxydable Ti
- Keyword (en)
- Stainless steels Diamond-like carbon Thermal expansion coefficient Internal stresses Thermal stresses Interlayers Thin films Film growth Doping Stress effects Microstructure Mechanical properties Electronic structure Bias voltage Titanium
- Keyword (es)
- Coeficiente dilatación térmica Doping Voltage polarización
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C20 Surface and interface electron states / 001B70C20A Surface states, band structure, electron density of states
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05T Fullerenes and related materials; diamonds, graphite
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18747662
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.02.069 
https://dx.doi.org/10.1016/j.tsf.2007.02.069
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