Initial oxidation of HF-acid treated Si(100) surfaces under air exposure studied by synchrotron radiation X-ray photoelectron spectroscopy
- Author
- HIROSE, F1 ; NAGATO, M1 ; KINOSHITA, Y1 ; NAGASE, S1 ; NARITA, Y2 ; SUEMITSU, M3
[1] Department of Electrical Engineering, Faculty of Engineering, Yamagata University, 4-3-16 Jonan, Yonezawa 992-8510, Japan
[2] Faculty of Engineering, Kyushu Institute of Technology, Japan
[3] Center for Interdisciplinary Research, Tohoku University, Japan - Source
Surface science. 2007, Vol 601, Num 11, pp 2302-2306, 5 p ; ref : 18 ref
- Publisher
- Elsevier Science, Amsterdam
/
Elsevier Science, Lausanne
/
Elsevier Science, New York, NY
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- HF-acid Oxidation Si(100) Si Synchrotron radiation XPS
- Keyword (fr)
- Oxydation Rayonnement synchrotron Silicium Spectre photoélectron RX Si
- Keyword (en)
- Oxidation Synchrotron radiation Silicon X-ray photoelectron spectra
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18790730
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.susc.2007.03.034 
https://dx.doi.org/10.1016/j.susc.2007.03.034
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