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Diffusion modeling of an HF argon plasma discharge in a magnetic field

Author
VIDAL, F1 ; JOHNSTON, T. W1 ; MARGOT, J2 ; CHAKER, M1 ; PAUNA, O2 3
[1] INRS-Énergie et Matériaux, Quebec, J3X 1S2, Canada
[2] Département de Physique, Université de Montréal, Montréal, Quebec, H3C 3J7, Canada
[3] CPAT, Université Paul Sabatier, Toulouse, France
Source

IEEE transactions on plasma science. 1999, Vol 27, Num 3, pp 727-745 ; ref : 27 ref

CODEN
ITPSBD
ISSN
0093-3813
Scientific domain
Nuclear physics; Plasma physics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Champ magnétique Couplage capacitif Diffusion Décharge Equilibre énergétique Etude théorique Haute fréquence Plasma
Keyword (en)
Magnetic fields Capacitive coupling Scattering Discharge Energy budgets Theoretical study High frequency Plasma
Keyword (es)
Acoplamiento electrostático Descarga Alta frecuencia
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B50 Plasma production and heating / 001B50B50G Plasma heating (beam injection, radio-frequency and microwave, ohmic, icr, ecr and current drive heating)

Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications

Pascal
001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges

Pacs
5250G Plasma heating (beam injection, radio-frequency and microwave, ohmic, ICR, ECR, and current drive heating)

Pacs
5280 Electric discharges

Discipline
Physics of gases, plasmas and electric discharges
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1879196

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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