Reduction of sidewall roughness, insertion loss and crosstalk of polymer arrayed waveguide grating using vapor-redissolution technique
- Author
- ZHANG, Hai-Ming1 ; MA, Chun-Sheng1 ; QIN, Zhen-Kun1 2 ; ZHANG, Xi-Zhen1 ; DAN-ZHANG1 ; LIU, Shi-Yong1 ; ZHANG, Da-Ming1 3
[1] State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China
[2] Jilin Normal University, Siping 136000, China
[3] State Key Laboratory on Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130021, China - Source
Thin solid films. 2007, Vol 515, Num 18, pp 7313-7317, 5 p ; ref : 12 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- Arrayed waveguide grating Crosstalk Insertion loss Vapor-redissolution
- Keyword (fr)
- Diaphonie Guide onde Microscopie électronique balayage Optique intégrée Polymère Rugosité Réseau sélectif planaire 4282E Substrat Si
- Keyword (en)
- Crosstalk Waveguide Scanning electron microscopy Integrated optics Polymer Roughness Arrayed waveguide gratings
- Keyword (es)
- Diafonía Guía onda Microscopía electrónica barrido Optica integrada Polímero Rugosidad
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18807205
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.02.068 
https://dx.doi.org/10.1016/j.tsf.2007.02.068
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