Radio frequency sputtered zinc oxide thin films with application to metal-semiconductor-metal photodetectors
- Author
- MEIYA LI1 ; CHOKSHI, Nehal2 ; DELEON, Robert L2 ; TOMPA, Gary2 ; ANDERSON, Wayne A1
[1] University at Buffalo, Electrical Engineering Department, 332 Banner Hall, Buffalo, NY 14260, United States
[2] AMBP Tech Corporation, 275 Cooper Avenue, Suite 112, Tonawanda, NY 14150, United States - Source
Thin solid films. 2007, Vol 515, Num 18, pp 7357-7363, 7 p ; ref : 16 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- Photodetectors Sputtering Zinc oxide
- Keyword (fr)
- Basse pression Composé minéral Condition opératoire Couche mince Courant obscurité Dépôt physique phase vapeur Emission électronique champ Forme cristalline Microscopie RX Microscopie électronique balayage Morphologie surface Métal transition composé Photodétecteur Photoluminescence Propriété optique Propriété électronique Pulvérisation haute fréquence Recuit Semiconducteur II-VI Silicium Spectre photoélectron RX Traitement surface Traitement thermique Zinc oxyde 7320 8105D 8115C 8560G Si Substrat verre ZnO
- Keyword (en)
- Low pressure Inorganic compounds Operating conditions Thin films Dark current Physical vapor deposition Electron field emission Crystal form X-ray microscopy Scanning electron microscopy Surface morphology Transition element compounds Photodetectors Photoluminescence Optical properties Electronic properties Radiofrequency sputtering Annealing II-VI semiconductors Silicon X-ray photoelectron spectra Surface treatments Heat treatments Zinc oxides
- Keyword (es)
- Condición operatoria Corriente obscuridad Forma cristalina Propiedad electrónica Pulverización alta frecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C20 Surface and interface electron states
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05H Other semiconductors
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F15 Optoelectronic devices
- Discipline
- Electronics Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18807213
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2007.03.026 
https://dx.doi.org/10.1016/j.tsf.2007.03.026
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