Nanostructure engineering in porous columnar thin films : recent advances
- Author
- STEELE, John J1 ; BRETT, Michael J1
[1] Department of Electrical and Computer Engineering, University of Alberta, T6G 2V4 Edmonton, AB, Canada - Source
Journal of materials science. Materials in electronics. 2007, Vol 18, Num 4, pp 367-379, 13 p ; ref : 76 ref
- ISSN
- 0957-4522
- Scientific domain
- Electronics; Condensed state physics
- Publisher
- Springer, Norwell, MA
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Capteur mesure Couche mince Dépôt physique phase vapeur Fabrication microélectronique Filtre optique Matériau poreux Microfluidique Nanostructure 0707D 4785N 8105R
- Keyword (en)
- Actuator Measurement sensor Thin film Physical vapor deposition Microelectronic fabrication Optical filter Porous material Microfluidics Nanostructure
- Keyword (es)
- Accionador Captador medida Capa fina Deposición física fase vapor Fabricación microeléctrica Filtro óptico Material poroso Nanoestructura
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A05 Specific materials / 001B80A05R Porous materials; granular materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02D Control theory. Systems / 001D02D11 Robotics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Computer science : theoretical automation and systems Electronics Metrology Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18829990
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s10854-006-9049-8 
https://dx.doi.org/10.1007/s10854-006-9049-8
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