Recommendations for the use of an atomic force microscope as an in-fab stiction monitor
- Author
- THORESON, Erik J1 ; MARTIN, J2 ; BURNHAM, N. A3
[1] DRA, Inc, Beavercreek, OH 45431, United States
[2] Analog Devices, Inc, Cambridge, MA 01609, United States
[3] Physics Department, Worcester Polytechnic Institute, Worcester, MA 01609, United States - Source
Journal of microelectromechanical systems. 2007, Vol 16, Num 3, pp 694-699, 6 p ; ref : 24 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Adhesion atomic force microscopy (AFM) microelectromechanical (MEMS) devices stiction
- Keyword (fr)
- Adhérence Dispositif microélectromécanique Etalonnage Etat amorphe Etat surface Frottement statique Matériau amorphe Microscopie force atomique Nanotechnologie Pointe microscope Poutre cantilever Propriété surface Rugosité Silicium oxyde Surface rugueuse Traitement thermique
- Keyword (en)
- Adhesion Microelectromechanical device Calibration Amorphous state Surface states Stiction Amorphous material Atomic force microscopy Nanotechnology Microscope tips Cantilever beam Surface properties Roughness Silicon oxides Rough surfaces Heat treatments
- Keyword (es)
- Dispositivo microelectromecánico Material amorfo Viga cantilever
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18856843
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2006.879664 
https://dx.doi.org/10.1109/JMEMS.2006.879664
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