Reduction of ion energies from a multicomponent Z-pinch plasma
- Author
- RUZIC, David N1 ; THOMPSON, Keith C1 ; JURCZYK, Brian E1 ; ANTONSEN, Erik L1 ; SRIVASTAVA, Shailendra N1 ; SPENCER, Josh B1
[1] Plasma Material Interaction Group, University of Illinois, Urbana, IL 61801, United States - Source
IEEE transactions on plasma science. 2007, Vol 35, Num 3, pp 606-613, 8 p ; ref : 30 ref.'
- CODEN
- ITPSBD
- ISSN
- 0093-3813
- Scientific domain
- Nuclear physics; Plasma physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- EUV lithography Z-pinch plasma ion acceleration multicomponent plasma
- Keyword (fr)
- Accélération particule Confinement inertiel plasma Confinement plasma Durée vie Dynamique plasma Erosion Etude expérimentale Explosion coulombienne Facteur réflexion Flux ion Ion lourd Lithographie UV Plasma composite Rugosité Striction longitudinale Xénon 5258L
- Keyword (en)
- Particle acceleration Plasma inertial confinement Plasma confinement Lifetime Plasma dynamics Erosion Experimental study Coulomb explosion Reflectivity Ion flux Heavy ions Ultraviolet lithography Multicomponent plasma Roughness Longitudinal pinch Xenon
- Keyword (es)
- Aceleración partícula Dinámica plásmica Explosión coulombiana
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B58 Other confinement methods / 001B50B58L Z-pinches, plasma focus and other pinch devices
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18877831
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TPS.2007.896983 
https://dx.doi.org/10.1109/TPS.2007.896983
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