AFM nanooxidation process - : Technology perspective for mesoscopic structures
- Author
- CAMBEL, V1 ; MARTAUS, J1 ; SOLTYS, J1 ; KUDELA, R1 ; GREGUSOVA, D1
[1] Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbrauská cesta 9, 84104 Bratislava, Slovakia - Conference title
- NANOSEA 2006: International conference on NANO-Structures self-assembling, Congress Center, Aix-en-Provence, France, 2-6 July 2006
- Conference name
- International conference on nanostructures self-assembled (Aix-en-Provence 2006-07-02)
- Author (monograph)
- BERBEZIER, Isabelle (Editor); DE CRESCENZI, Maurizio (Editor)
- Source
Surface science. 2007, Vol 601, Num 13, pp 2717-2723, 7 p ; ref : 17 ref
- Publisher
- Elsevier Science, Amsterdam
/
Elsevier Science, Lausanne
/
Elsevier Science, New York, NY
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Atomic force microscope Finite element method GaAs/AlGaAs heterostructure Local anodic oxidation Nanotechnology
- Keyword (fr)
- Aluminium arséniure Anodisation Composé binaire Composé minéral Composé ternaire Gallium arséniure Hétérostructure Microscopie force atomique Méthode élément fini Nanotechnologie Semiconducteur Système mésoscopique Al As Ga AlGaAs As Ga GaAs
- Keyword (en)
- Aluminium arsenides Anodizing Binary compounds Inorganic compounds Ternary compounds Gallium arsenides Heterostructures Atomic force microscopy Finite element method Nanotechnology Semiconductor materials Mesoscopic systems
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18925722
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.susc.2006.12.058 
https://dx.doi.org/10.1016/j.susc.2006.12.058
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