Electrostatic polymer-based micro-deformable mirror for adaptive optics
- Author
- ZAMKOTSIAN, Frederic1 ; CONEDERA, Veronique2 ; GRANIER, Hugues2 ; LIOTARD, Amaud1 ; LANZONI, Patrick1 ; SALVAGNAC, Ludovic2 ; FABRE, Norbert2 ; CAMON, Henri2
[1] Laboratoire d'Astrophysique de Marseille, 2, place Le Verrier, 13248 Marseille, France
[2] Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), 7 avenue du colonel Roche, 31077 Toulouse, France - Conference title
- MEMS adaptive optics (24-25 January 2007, San Jose, California, USA)
- Conference name
- MEMS adaptive optics (2007)
- Author (monograph)
- Olivier, Scot S (Editor); Bifano, Thomas G (Editor); Kubby, Joel A (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Center for Adaptive Optics, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64670P.1-64670P.12 ; ref : 13 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6580-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Composé binaire Dispositif microoptoélectromécanique Dispositif microélectromécanique Etalonnage Force électrostatique Miroir déformable Optique adaptative Polymère Procédé sol gel Silicium oxyde 0707D 0710C 4279B 8585 O Si SiO2
- Keyword (en)
- Actuators Binary compounds Microoptoelectromechanical device Microelectromechanical device Calibration Electrostatic force Deformable mirror Adaptive optics Polymers Sol-gel process Silicon oxides
- Keyword (es)
- Dispositivo microoptoelectromecánico Dispositivo microelectromecánico Fuerza electrostática Espejo deformable
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79B Lenses, prisms, and mirrors
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937435
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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