CMOS integrable micro mirrors with highly improved drift-stability
- Author
- SCHMIDT, Jan U1 ; KNOBBE, Jens1 ; GEHNER, Andreas1 ; LAKNER, Hubert1
[1] Fraunhofer Institute of Photonic Microsystems, Maria-Reiche-Str. 2, 01109 Dresden, Germany - Conference title
- MEMS adaptive optics (24-25 January 2007, San Jose, California, USA)
- Conference name
- MEMS adaptive optics (2007)
- Author (monograph)
- Olivier, Scot S (Editor); Bifano, Thomas G (Editor); Kubby, Joel A (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Center for Adaptive Optics, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64670R.1-64670R.11 ; ref : 16 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6580-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Dispositif microélectromécanique Microusinage Miroir Optique adaptative Rayon X Surface optique Température ambiante Traitement surface 0707D 8585
- Keyword (en)
- Actuator Microelectromechanical device Micromachining Mirror Adaptive optics X ray Optical surface Room temperature Surface treatment
- Keyword (es)
- Accionador Dispositivo microelectromecánico Micromaquinado Espejo Optica adaptativa Rayos X Superficie óptica Temperatura ambiente Tratamiento superficie
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937437
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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