New high repetition rate, high energy 308 nm excimer laser for material processing
- Author
- HERBST, Ludolf1 ; KLAFT, Ingo1 ; SCHMIDT, Kai1 ; BRAGIN, Igor1 ; ALBRECHT, Hans-Stephan1
[1] Coherent GmbH, Hans-Boeckler-Strasse 12, 37079 Goettingen, Germany - Conference title
- Laser-based micro-and nanopackaging and assembly (22-24 January 2007, San Jose CA, US)
- Conference name
- Laser-based micro- and nanopackaging and assembly. Conference (San Jose CA 2007)
- Author (monograph)
- Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
- Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64590I.1-64590I.8 ; ref : 8 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6572-6
- Scientific domain
- Electronics; Nanotechnologies, nanostructures, nanoobjects; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Application laser Couche mince Polycristal Source UV Source rayonnement Traitement matériau Traitement par laser Xénon chlorure 4262C 4272B
- Keyword (en)
- Laser beam applications Thin films Polycrystals Ultraviolet sources Radiation sources Material processing Laser assisted processing Xenon chlorides
- Keyword (es)
- Tratamiento material
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B62 Biological and medical applications / 001B40B62C Industrial applications
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B72 Optical sources and standards / 001B40B72B Visible and ultraviolet sources
- Discipline
- Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937506
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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