Nanoscale pattern transfer for templates, NEMs, and nano-optics
- Author
- OLYNICK, Deirdre L1 ; LIDDLE, J. Alexander1 ; HARTENECK, Bruce D1 ; CABRINI, Stefano1 ; RANGELOW, Ivo W1
[1] Lawrence Berkeley National Laboratory, Molecular Foundry'1 One Cyclotron Road, Mail Stop 67-2206, Berkeley, CA 94720, United States - Conference title
- Micromachining technology for micro-optics and nano-optics V and Microfabrication process technology XII (22-24 January 2007, San Jose, California, USA)
- Conference name
- Micromachining technology for micro-optics and nano-optics (5 ; 2007)
- Author (monograph)
- Perez-Maher, Mary Ann (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64620J.1-64620J.8 ; ref : 33 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6575-7
- Scientific domain
- Electronics; Nanotechnologies, nanostructures, nanoobjects; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Etude expérimentale Gravure plasma Lithographie Procédé fabrication Silicium Traitement matériau Traitement par plasma 4279 4282C 5277B 8116N 8585 Nanolithographie Nanooptique
- Keyword (en)
- Experimental study Plasma etching Lithography Manufacturing processes Silicon Material processing Plasma assisted processing Nanolithography Nano-optics
- Keyword (es)
- Grabado plasma Tratamiento material
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B83 Micro- and nanooptical devices
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B77 Plasma applications / 001B50B77B Etching and cleaning
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16N Nanolithography
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Physics : optics Physics and materials science Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937538
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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