MEMS for medical technology applications
- Author
- FRISK, Thomas1 ; ROXHED, Niclas1 ; STEMME, Goran1
[1] Microsystem Technology Lab, School of Electrical Engineering Royal Institute of Technology (KTH), 100 44, Stockholm, Sweden - Conference title
- MEMS/MOEMS components and their applications IV (22-23 January 2007, San Jose, California, USA)
- Conference name
- MEMS/MOEMS components and their applications (4 ; 2007)
- Author (monograph)
- Ghodssi, Reza (Editor); Tadigadapa, Srinivas A (Editor); Henning, Albert Karl (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp ix-xvii ; ref : 20 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6577-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Appareillage Capteur mesure Circuit à la demande Contact électrique Coût fabrication Diminution coût Dispositif microélectromécanique Etude expérimentale Fabrication industrielle Instrumentation Microbalance quartz Micromachine Microsphère Miniaturisation Multifonctionnalité Nanotechnologie Nez électronique Procédé fabrication Quartz Silicium 0707D 0710P 8585
- Keyword (en)
- Actuators Instrumentation Measurement sensor Application specific integrated circuits Electric contacts Manufacturing cost Cost lowering Microelectromechanical device Experimental study Manufacturing Instruments Quartz microbalance Micromachine Microspheres Miniaturization Multifunctionality Nanotechnology Electronic nose Manufacturing processes Quartz Silicon
- Keyword (es)
- Captador medida Costo fabricación Reducción costes Dispositivo microelectromecánico Microbalanza cuarzo Micromáquina Multifuncionalidad Nariz electrónica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10P Instruments for strain, force and torque
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02D Control theory. Systems / 001D02D11 Robotics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Computer science : theoretical automation and systems Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937551
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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