Process development, design and characterization of high-finesse micromachined optical Fabry-Perot microcavities
- Author
- PRUESSNER, Marcel W1 ; STIEVATER, Todd H1 ; RABINOVICH, William S1
[1] Naval Research Laboratory, Photonics Technology Branch (Code 5654), 4555 Overlook Avenue SW, Washington, DC 20375, United States - Conference title
- MEMS/MOEMS components and their applications IV (22-23 January 2007, San Jose, California, USA)
- Conference name
- MEMS/MOEMS components and their applications (4 ; 2007)
- Author (monograph)
- Ghodssi, Reza (Editor); Tadigadapa, Srinivas A (Editor); Henning, Albert Karl (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64640N.1-64640N.10 ; ref : 19 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6577-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Effet thermooptique Etude expérimentale Facteur réflexion Guide onde optique Guide onde rebord Microcavité optique Microusinage Miroir Nanotechnologie Optique intégrée Rugosité Réflecteur Réflexion Bragg répartie Résonateur Fabry Pérot Silicium Technologie silicium sur isolant 0710P 4279F 4279G
- Keyword (en)
- Thermo-optical effects Experimental study Reflectivity Optical waveguides Rib waveguides Optical microcavity Micromachining Mirrors Nanotechnology Integrated optics Roughness Reflectors Distributed Bragg reflection Fabry-Perot resonators Silicon Silicon-on-insulator
- Keyword (es)
- Reflexión Bragg repartida
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10P Instruments for strain, force and torque
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79F Reflectors, beam splitters, and deflectors
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Discipline
- Electronics Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18937569
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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