On-chip electrometer using MEMS parallel-plate pull-in sensing
- Author
- WEBB, Russell Y1 ; MACDONALD, Noel C2
[1] Electrical and Computer Engineering, University of Canterbury, Christchurch, New Zealand
[2] Department of Mechanical and Environmental Engineering, University of California, Santa Barbara, CA, United States - Issue title
- Intelligent sensing technologies and applications
- Author (monograph)
- DEMIDENKO, S (Editor)1 2 ; MUKHOPADHYAY, S (Editor)1 ; SEN GUPTA, G (Editor)1 3
[1] Massey University, New Zealand
[2] Monash University, Australia
[3] Singapore Polytechnic, Singapore - Source
International journal of intelligent systems technologies and applications (Print). 2007, Vol 3, Num 1-2, pp 149-162, 14 p ; ref : 3/4 p
- ISSN
- 1740-8865
- Scientific domain
- Control theory, operational research
- Publisher
- Inderscience, Genève
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- MEMS electrometer isolation metrology microelectromechanical systems parallel-plate pull-in voltage reference
- Keyword (fr)
- Accord fréquence Capteur mesure Circuit intégré monolithique Conception machine Contrôle chute potentiel Courant continu Courant fuite Dispositif microélectromécanique Echantillonnage Electromètre Mesure Métrologie Plaque parallèle Système sur puce Tension électrique Transducteur capacitif
- Keyword (en)
- Tuning Measurement sensor Monolithic integrated circuits Machine design Potential drop method Direct current Leakage currents Microelectromechanical device Sampling Electrometers Metering Metrology Parallel plate System on a chip Voltage Capacitive transducer
- Keyword (es)
- Captador medida Concepción máquina Control caída voltaje Dispositivo microelectromecánico Muestreo Placa paralela Voltaje Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02C Artificial intelligence
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12A General
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12C Industrial metrology. Testing / 001D12C01 General
- Discipline
- Computer science : theoretical automation and systems Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18945072
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1504/IJISTA.2007.014132 
https://dx.doi.org/10.1504/IJISTA.2007.014132
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