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Ellipsometric data analysis used in on-line metal passivation monitoring

Author
BOGDANOWICZ, R1 ; RYL, J2
[1] Gdansk University of Technology, Department of Optoelectronics, Narutowicza 11/12 Street, 80-952 Gdańsk, Poland
[2] Gdańsk University of Technology, Department of Electrochemistry, Corrosion and Materials Engineering Narutowicza 11/12 Street, 80-952 Gdańsk, Poland
Conference title
Advances in atomic and molecular spectroscopy
Conference name
Workshop on Atomic and Molecular Physics (6 ; Jurata 2006-09-25)
Author (monograph)
KWELA, Jerzy (Editor)1 ; DROZDOWSKI, R (Editor)1 ; WASOWICZ, T. J (Editor)1
University of Gdańsk, Institute of Experimental Physics, 80-952 Gdańsk, Poland (Organiser of meeting)
[1] University of Gdańsk, 80-952 Gdańsk, Poland
Source

The European physical journal. Special topics. 2007, Vol 144, pp 215-220, 6 p ; ref : 14 ref

Scientific domain
Physics
Publisher
EDP Sciences, [S.l.] / Springer, [S.l.]
Publication country
France
Document type
Conference Paper
Language
English
Keyword (fr)
Analyse donnée Conversion énergie Couche mince Ellipsométrie Energie solaire Epaisseur couche Erreur quadratique moyenne Etude théorique Indice réfraction Modèle milieu effectif Multicouche Méthode mesure Méthode optimisation Méthode optique Oxyde métallique Photocatalyse 0705K 0760F
Keyword (en)
Data analysis Energy conversion Thin films Ellipsometry Solar energy Layer thickness Mean square error Theoretical study Refractive index Effective medium model Multilayers Measuring methods Optimization method Optical method Metal oxides Photocatalysis
Keyword (es)
Espesor capa Error medio cuadrático Modelo medio efectivo Método optimización Método óptico Fotocatálisis
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G05 Computers in experimental physics / 001B00G05K Data analysis: algorithms and implementation; data management

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques / 001B00G60F Polarimeters and ellipsometers

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18956806

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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