Recent developments on microablation of glass materials using excimer lasers

Author

TSENG, Ampere A¹ ; CHEN, Ying-Tung² ; CHAO, Choung-Lii³ ; MA, Kung-Jeng⁴ ; CHEN, T. P⁵
[1] Graduate Institute of Automation and Control, National Taiwan University of Science and Technology, Taipei, Taiwan, Province of China
[2] Department of Mechanical Engineering, Chung Cheng Institute of Technology, Tashi, 33508, Taiwan, Province of China
[3] Department of Mechanical Engineering, Tam-Kang University, Tamsui, 25317, Taiwan, Province of China
[4] Department of Mechanical Engineering, Chung Hua University, Hsinchu, 30067, Taiwan, Province of China
[5] School of Electrical and Electronic Engineering, Nanyang Technology University, Singapore

Source

Optics and lasers in engineering. 2007, Vol 45, Num 10, pp 975-992, 18 p ; ref : 33 ref

CODEN

OLENDN

ISSN

0143-8166

Scientific domain

Electronics; Optics; Telecommunications

Publisher

Elsevier, Oxford

Publication country

United Kingdom

Document type

Article

Language

English

Author keyword

Ablation Curved surface Diffraction grating Excimer laser Fused silica Glass Microlens Micromachining Microneedles Waveguides

Keyword (fr)

Application laser Guide onde optique Laser excimère Laser gaz Microlentille Microoptique Microstructure Microusinage Méthode ablation laser Réseau diffraction Surface courbe Usinage laser Verre borosilicate 4255L 4262C 4279D 4279G Photonique Silice fusionnée

Keyword (en)

Laser beam applications Optical waveguides Excimer lasers Gas lasers Microlenses Micro-optics Microstructure Micromachining Laser ablation technique Diffraction gratings Curved surface Laser beam machining Borosilicate glass Photonics

Keyword (es)

Superficie curva

Classification

Pascal

001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B55 Lasers / 001B40B55L Gas lasers including excimer and metal-vapor lasers

Pascal

001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B62 Biological and medical applications / 001B40B62C Industrial applications

Pascal

001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B79 Optical elements, devices, and systems / 001B40B79D Gratings

Pascal

001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline

Electronics Physics : optics

Origin

Inist-CNRS

Database

PASCAL

INIST identifier

18968395

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