3-D microoptic systems integration : advances in fabrication and packaging
- Author
- JAHNS, J1 ; BOHLING, M1 ; JARCZYNSKI, M1 ; SEILER, Th1
[1] University of Hagen, Optische Nachrichtentechnik Universitätsstr. 27/PRG, 58084 Hagen, Germany - Conference title
- Photonics packaging, integration, and interconnects VII (23-25 January, 2007, San Jose, California, USA)
- Conference name
- Photonics packaging, integration, and interconnects (7 ; 2007)
- Author (monograph)
- Earman, Allen M (Editor); Chen, Ray T (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64780D.1-64780D.4 ; ref : 16 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6591-7
- Scientific domain
- Electronics; Optics; Physics
- Publisher
- SPIE, Bellingham, Wash
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Champ optique Communication donnée Diminution coût Echelle gris Fabrication microélectronique Interconnexion optique Lithographie Microoptique Microusinage Packaging électronique Planarisation Système optique Télécommunication optique 4279S 4279T
- Keyword (en)
- Optical field Data communication Cost lowering Gray scale Microelectronic fabrication Optical interconnection Lithography Microoptics Micromachining Electronic packaging Planarization Optical system Optical telecommunication
- Keyword (es)
- Campo óptico Reducción costes Escala gris Fabricación microeléctrica Interconexión óptica Litografía Microóptica Micromaquinado Packaging electrónico Planarización Sistema óptico Telecomunicación óptica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C4 Miscellaneous
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D04 Telecommunications and information theory / 001D04B Telecommunications / 001D04B08 Optical telecommunications
- Discipline
- Electronics Telecommunications and information theory
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18971861
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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