Electrostatic 1D micro scanner with vertical combs for HD resolution display
- Author
- CHO, Jin-Woo1 ; PARK, Yong-Hwa1 ; SUNU, John1 ; KO, Young-Chul1 ; LEE, Byeung-Leul1 ; KANG, Seok-Jin2 ; CHUNG, Seok-Whan2 ; CHOI, Won-Kyoung1 ; CHO, Yong-Chul1 ; CHANG, Seok-Mo1 ; LEE, Jin-Ho1
[1] Micro Device & Systems Lab, Samsung Advanced Institute of Technology P. O. Box 111, Suwon 440-600, Korea, Republic of
[2] Nano Fabrication Technology Center, Samsung Advanced Institute of Technology P. O. Box 111, Suwon 440-600, Korea, Republic of - Conference title
- MOEMS and miniaturized systems VI (24-25 January 2007, San Jose, California, USA)
- Conference name
- MOEMS and miniatured systems. Conference (6 ; 2007)
- Author (monograph)
- Dickensheets, David L (Editor); Gogoi, Bishnu P (Editor); Schenk, Harald (Editor)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64660B.1-64660B.12 ; ref : 24 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6579-5
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Algorithme Commande tension Déformation Etude expérimentale Etude théorique Excitateur Fiabilité Fréquence résonance Microoptique Miroir Mode opératoire Méthode numérique Méthode élément fini Optimisation Qualité image Résolution image Scanneur Surface arrière Système asservi
- Keyword (en)
- Algorithm Voltage control Deformation Experimental study Theoretical study Driver Reliability Resonance frequency Microoptics Mirror Operating mode Numerical method Finite element method Optimization Image quality Image resolution Scanner Back surface Feedback system
- Keyword (es)
- Algoritmo Control tensión Deformación Estudio experimental Estudio teórico Excitador Fiabilidad Frecuencia resonancia Microóptica Espejo Método operatorio Método numérico Método elemento finito Optimización Calidad imagen Resolución imagen Escáner Superficie atrás Servomecanismo
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F16 Imaging devices
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18971977
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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