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MOEMS development of infrared security sensors

Author
LIDDIARD, Kevin C1
[1] Electro-optic Sensor Design, PO Box 137, St Agnes, S.A., 5097, Australia
Conference title
Smart structures, devices, and systems III (11-13 December 2006, Adelaire, Australia)
Conference name
Smart structures, devices, and systems (3 ; 2006)
Author (monograph)
Al-Sarawi, Said F (Editor)
Defence Science and Technology Organisation, Australia (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 641417.1-641417.10 ; ref : 13 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
978-0-8194-6522-1
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics
Publisher
SPIE, Bellingham WA
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Application militaire Dispositif microoptoélectromécanique Dispositif microélectromécanique Etude expérimentale Matrice détecteur Matrice plan focal Pixel Silicium 0710C 0757K 8585 8920D Microbolomètre
Keyword (en)
Military application Microoptoelectromechanical device Microelectromechanical device Experimental study Dectector arrays Focal plane arrays Pixel Silicon Microbolometers
Keyword (es)
Aplicación militar Dispositivo microoptoelectromecánico Dispositivo microelectromecánico Pixel
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G57 Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques / 001B00G57K Bolometer; infrared, submillimeter wave, microwave and radiowave receivers and detectors

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D17 Other techniques and industries

Discipline
Electronics Generalities in applied sciences Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18972156

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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