Fabrication of high aspect ratio coil for electromagnetic actuators using LIGA process
- Author
- NODA, D1 ; MATSUMOTO, Y1 ; YAMASHITA, S1 ; SETOMOTO, M1 ; HATTORI, T1
[1] Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, kamigori-cho, Ako-gun, Hyogo 678-1205, Japan - Conference title
- Smart structures, devices, and systems III (11-13 December 2006, Adelaire, Australia)
- Conference name
- Smart structures, devices, and systems (3 ; 2006)
- Author (monograph)
- Al-Sarawi, Said F (Editor)
Defence Science and Technology Organisation, Australia (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 64141H.1-64141H.8 ; ref : 9 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6522-1
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur Etude expérimentale Lithographie RX Microactionneur Système mesure 0707D
- Keyword (en)
- Actuators Experimental study X-ray lithography Microactuators Measurement systems
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18972163
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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