Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application
- Author
- WANG, Z. J1 ; KOKAWA, H1 ; TAKIZAWA, H2 ; ICHIKI, M3 ; MAEDA, R3
[1] Department of Materials Processing, Graduate School of Engineering, Tohoku University, Aoba-yama 02, Sendai 980-8579, Japan
[2] Department of Materials Chemistry, Graduate School of Engineering, Tohoku University, Aoba-yama 07, Sendai 980-8579, Japan
[3] National Institute of Advanced Industrial Science and Technology (AIST), 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan - Conference title
- Smart materials IV (11-13 December 2006, Adelaide, Australia)
- Conference name
- Smart materials (4 ; 2006)
- Author (monograph)
- Voelcker, Nicolas H (Editor)
Defence Science and Technology Organisation, Australia (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2007 ; 1Vol, pp 641308.1-641308.8 ; ref : 25 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 978-0-8194-6521-4
- Scientific domain
- Electronics; Metrology and instrumentation; Optics; Condensed state physics; Physics
- Publisher
- SPIE, Bellingham WA
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composé binaire Couche mince Diffraction RX Dispositif microélectromécanique Hyperfréquence Matériau capteur Matériau intelligent Microscopie électronique balayage Microstructure Perovskite Plomb zirconate Procédé sol gel Propriété électrique Silicium oxyde Titanate Traitement thermique 0710C 8585 O Si SiO2 Substrat Silicium
- Keyword (en)
- Binary compound Thin film X ray diffraction Microelectromechanical device Microwave Sensor materials Smart materials Scanning electron microscopy Microstructure Perovskite Lead zirconates Sol gel process Electrical properties Silicon oxides Titanates Heat treatment
- Keyword (es)
- Compuesto binario Capa fina Difracción RX Dispositivo microelectromecánico Hiperfrecuencia Microscopía electrónica barrido Microestructura Perovskita Procedimiento sol gel Propiedad eléctrica Titanato Tratamiento térmico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18972286
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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