Frequency selective IR-filter produced by using EB-lithography
- Author
- KATHURIA, Y. P1
[1] Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Powai, Mumbai 400076, India - Conference title
- E-MRS IUMRS ICEM 2006 Spring Meeting, Nice, France - May 29-June 2, 2006, Symposium H: Photon-Assisted Synthesis and Processing of Functional Materials
- Conference name
- Photon-Assisted Synthesis and Processing of Functional Materials. E-MRS Symposium H (Nice 2006-05-29)
- Author (monograph)
- DINESCU, Maria (Editor)1 ; FUKUMURA, Hiroshi (Editor)2 ; HELVAJIAN, Henry (Editor)3 ; MILLON, Eric (Editor)4 ; SZÖRENYI, Tamas (Editor)5
European Material Research Society, Strasbourg, France (Organiser of meeting)
[1] NILPRP, Bucharest, Romania
[2] Tohoku University, Sendai, Japan
[3] The Aerospace Corporation, Los Angeles, United States
[4] University of Orleans, France
[5] University of Szeged, Hungary - Source
Applied surface science. 2007, Vol 253, Num 19, pp 7826-7830, 5 p ; ref : 15 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Cross diplexer Infra-red Lithography
- Keyword (fr)
- Lithographie
- Keyword (en)
- Lithography
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18977058
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2007.02.141 
https://dx.doi.org/10.1016/j.apsusc.2007.02.141
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