Influence of in situ nitrogen pressure on crystallization of pulsed laser deposited AlN films

Author

BAKALOVA, S¹ ; SZEKERES, A¹ ; CZIRAKI, A² ; LUNGU, C. P³ ; GRIGORESCU, S⁴ ; SOCOL, G⁴ ; AXENTE, E⁴ ; MIHAILESCU, I. N⁴
[1] Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko Chaussee 72, Sofia 1784, Bulgaria
[2] Eotvos Lorand University, Faculty of Solid State Physics, 1 Pazmany Peter Setany, 1117 Budapest, Hungary
[3] National Institute for Lasers, Plasma and Radiation Physics, 409 Atomistilor, 77125 Magurele-Buchurest, Romania
[4] Lasers Department, National Institute for Lasers, Plasma, and Radiation Physics, P.O. Box MG-54, 77125 Bucharest-Magurele, Romania

Conference title

E-MRS IUMRS ICEM 2006 Spring Meeting, Nice, France - May 29-June 2, 2006, Symposium H: Photon-Assisted Synthesis and Processing of Functional Materials

Conference name

Photon-Assisted Synthesis and Processing of Functional Materials. E-MRS Symposium H (Nice 2006-05-29)

Author (monograph)

DINESCU, Maria (Editor)¹ ; FUKUMURA, Hiroshi (Editor)² ; HELVAJIAN, Henry (Editor)³ ; MILLON, Eric (Editor)⁴ ; SZÖRENYI, Tamas (Editor)⁵
European Material Research Society, Strasbourg, France (Organiser of meeting)
[1] NILPRP, Bucharest, Romania
[2] Tohoku University, Sendai, Japan
[3] The Aerospace Corporation, Los Angeles, United States
[4] University of Orleans, France
[5] University of Szeged, Hungary

Source

Applied surface science. 2007, Vol 253, Num 19, pp 8215-8219, 5 p ; ref : 15 ref

ISSN

0169-4332

Scientific domain

General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics

Publisher

Elsevier Science, Amsterdam

Publication country

Netherlands

Document type

Conference Paper

Language

English

Author keyword

Aluminium nitride Plasma diagnostics Pulsed laser deposition X-ray Diffractometry

Keyword (fr)

Aluminium nitrure Azote Composé minéral Cristallisation Croissance film Diagnostic plasma Diffraction RX Dépôt laser pulsé In situ Laser pulsé Semiconducteur Al N AlN N

Keyword (en)

Aluminium nitrides Nitrogen Inorganic compounds Crystallization Film growth Plasma diagnostics XRD Pulsed laser deposition In situ Pulsed lasers Semiconductor materials

Keyword (es)

In situ

Classification

Pascal

001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties

Pascal

001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties

Pascal

001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology

Discipline

Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties

Origin

Inist-CNRS

Database

PASCAL

INIST identifier

18977136

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