Nano-scale surface modification using gas cluster ion beams - : A development history and review of the Japanese nano-technology program
- Author
- YAMADA, Isao1 ; TOYODA, Noriaki1
[1] Laboratory of Advanced Science and Technology, University ofHyogo, Kamigori, Hyogo, 678-1205, Japan - Conference title
- Proceedings of the 14th International Conference on Surface Modification of Materials by Ion Beams, SMMIB'05, Kuşadasi, 4-9 September, 2005
- Conference name
- SMMIB'05 : International Conference on Surface Modification of Materials by Ion Beams (14 ; Kuşadasi 2005-09-04)
- Author (monograph)
- OZTARHAN, Ahmet (Editor)1 ; BAGLIN, John E. E (Editor)2 ; BROWN, Ian G (Editor)3 ; ILA, Daryush (Editor)4
[1] Ege University, Izmir, Turkey
[2] IBM Almaden Research Center, San Jose, CA, United States
[3] Lawrence Berkeley National Laboratory, Berkeley, CA, United States
[4] Alabama A&M University, Huntsville, AL, United States - Source
Surface & coatings technology. 2007, Vol 201, Num 19-20, pp 8579-8587, 9 p ; ref : 30 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Cluster ion beam assisted deposition Cluster ion beams Lateral sputtering Shallow implantation Surface smoothing
- Keyword (fr)
- Amas Dépôt bombardement ionique Développement Faisceau ionique Pulvérisation irradiation Traitement surface
- Keyword (en)
- Cluster Ion beam coating Ontogenesis Ion beam Sputtering Surface treatments
- Keyword (es)
- Montón Revestimiento bombardeo iónico Haz iónico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18997167
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.surfcoat.2006.02.081 
https://dx.doi.org/10.1016/j.surfcoat.2006.02.081
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