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Cross-sectional specimen preparation from ICs downside for SEM and TEM-failure analyses using focused ion beam etching

Author
ALTMANN, F1 ; KATZER, D1
[1] Fraunhofer Institut für Werkstoffmechanik Halle, Heideallee 19, 06120Halle, Germany
Conference title
Proceedings of the Thin Films and Electronic Materials and Processing sessions from the 14th International Vacuum Congress, Birmingham, UK, 31 August-4 September, 1998
Conference name
IVC-14: International Vacuum Congress (14 ; Birmingham 1998-08-31)
Author (monograph)
HOWSON, R. P (Editor); PETTY, M (Editor)1 ; JACKMAN, R. B (Editor)2 ; YASUDA, Y (Editor)
British Vacuum Council, United Kingdom (Funder/Sponsor)
Institute of Physics, London, United Kingdom (Funder/Sponsor)
International Union for Vacuum Science, Technique and Applications, International (Funder/Sponsor)
[1] Loughborough Surface Analysis Ltd, United Kingdom
[2] University College of London, United Kingdom
Source

Thin solid films. 1999, Vol 343-4, pp 609-611 ; ref : 5 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Electronics; Metallurgy, welding; Condensed state physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Conference Paper
Language
English
Keyword (fr)
Analyse dommage Circuit intégré Connexion épaissie Coupe transversale Essai Gravure faisceau ionique Implantation(topométrie) Interconnexion Localisation défaut Microscopie électronique balayage Microscopie électronique transmission Préparation échantillon
Keyword (en)
Failure analysis Integrated circuit Flip chip Cross section Test Ion beam etching Layout Interconnection Defect localization Scanning electron microscopy Transmission electron microscopy Sample preparation
Keyword (es)
Análisis avería Circuito integrado Conexión espesada Corte transverso Ensayo Grabado haz iónico Implantación(topometría) Interconexión Localización imperfección Microscopía electrónica barrido Microscopía electrónica transmisión Preparación muestreo
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1909965

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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